Wuxi Huatong Pneumatic Manufacture
Pneumatics/Solenoid Valve/Cylinder
TEL:0086-510-83593211
GZK Series High Vacuum Solenoid Valves

GZK Series High Vacuum Solenoid Valves


GZK512/GZK712 series high vacuum solenoid valves are independently developed and produced by professional Chinese high-end equipment manufacturers. With mature precision manufacturing technology and strict industrial quality standards, the products are fully compatible with imported equivalent products in installation size and service performance. Widely applied in semiconductor, photovoltaic, new energy lithium battery and other high-end precision manufacturing industries, delivering stable, efficient and cost-effective vacuum & gas fluid control solutions for global industrial clients.

GZK512 Series High Vacuum Solenoid Valves

Compact 40mm narrow body structure, equipped with φ4.5 and φ6 standard flow channels, normally closed design, passed CE safety certification. Ideal for precise flow regulation of high vacuum environment and various inert process gases.

  • ✓ Applicable medium: Dry air, high vacuum, inert industrial gas

  • ✓ Maximum proof pressure: 5.0MPa

  • ✓ Ultra-low helium leakage rate: ≤1.0×10⁻⁹ Pa·m³/s

  • ✓ Mechanical service life: Up to 2 million switching cycles

  • ✓ Diversified interface: JXR joint, double ferrule, NPT/RC thread

GZK712 Series High Vacuum Solenoid Valves

70mm wide body large flow specification, supporting φ12 and φ15 large-caliber circulation, matched with φ52 standard flange connection, compliant with RoHS environmental standard, specially developed for high-flow vacuum pipeline and mass inert gas conveying scenarios.

  • ✓ Applicable medium: High vacuum, high purity inert gas

  • ✓ Maximum flow coefficient Cv: 4.7

  • ✓ Ultra-low helium leakage rate: ≤1.0×10⁻⁹ Pa·m³/s

  • ✓ Optional voltage: AC100V, AC200V, DC24V

  • ✓ Main connection form: Flange, VCR precision joint

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Product Display

GZK512 Vacuum ValveGZK712 Vacuum ValveHigh Vacuum Solenoid ValveIndustrial Vacuum Valve

Core Technical Strengths


Relying on profound precision fluid control technology accumulation, we strictly follow international manufacturing standards to create high-reliability vacuum valve products, helping global manufacturing enterprises optimize pipeline control systems and reduce overall operating costs.

Superior Sealing Performance

Internal and external double sealing design, effectively control trace air leakage, keep stable vacuum degree and medium purity of the whole system.

Durable Long Service Life

Optimized internal transmission structure, greatly extend service cycle, reduce equipment maintenance frequency and after-sales cost.

Energy Saving & Low Consumption

Optimized electromagnetic coil structure, stable operation and lower power consumption, more suitable for long-term continuous industrial operation.

Free Angle Installation

No limitation on installation direction, flexible layout, save industrial equipment internal space and convenient system integration.

Rich Connection Options

Multiple standard connection methods are reserved to match different regional equipment standards and on-site pipeline layout requirements.

High Cleanliness Grade

Made of high-quality stainless steel materials, meeting SEMI industry standards, safe and reliable for high-clean production workshops.

Professional technical team provides one-to-one industrial matching support within 2 working hours. Get Professional Solution

Main Industrial Application Fields


This series of high vacuum solenoid valves has strong industry compatibility and can stably serve many high-end precision manufacturing fields around the world.

Semiconductor Industry

Semiconductor Manufacturing Industry

Core production processes such as chip etching, film deposition and ion implantation are carried out in ultra-high vacuum environment, with extremely strict requirements for product air tightness and operational stability.

Typical Application Scenarios:

  • Process gas flow control of ion implantation equipment

  • Vacuum chamber isolation and protection for PVD & CVD equipment

  • Precise gas distribution for wafer etching production line

  • Vacuum pipeline switch control for wafer transmission system

Photovoltaic New Energy Industry

Cell diffusion, thin film coating and other core processes rely on stable high vacuum environment, and high-purity gas control is the key to ensure product conversion efficiency.

Typical Application Scenarios:

  • Atmospheric adjustment control of PERC cell coating production line

  • Boron source gas regulation for TOPCon cell diffusion process

  • Vacuum system stable control of HJT cell PECVD equipment

  • Inert gas protection control for photovoltaic glass deep processing

PV Energy Industry
Lithium Battery Industry

Power Lithium Battery Industry

Strictly control internal metal impurities, effectively avoid battery self-discharge risk, and comprehensively improve product cycle life and use safety.

Typical Application Scenarios:

  • Vacuum drying treatment of positive and negative electrode sheets

  • Quantitative vacuum injection of internal electrolyte

  • Vacuum degassing and formation process control

  • Sealed vacuum protection for finished battery packaging

High Purity Gas Delivery System

The whole pipeline has extremely high requirements for tightness, any tiny air leakage will cause gas purity decline and affect the final finished product quality.

Typical Application Scenarios:

  • Electronic grade special gas centralized conveying pipeline

  • Factory centralized high-purity gas supply system

  • Laboratory precision gas distribution equipment

  • Industrial gas purification and terminal control equipment

High Purity Gas System

Tunnel Boring Machine Auxiliary Gas System

Nitrogen safety protection system core control component, fast response speed and strong environmental adaptability, stable operation in complex and harsh construction working conditions.

Chemical Fluidized Bed Reaction Equipment

Widely used in fine chemical, pharmaceutical synthesis and other industries, suitable for vacuum sampling and raw material negative pressure feeding control.

Vacuum Coating Production Line

Quick opening and closing action accurately control coating thickness and film layer uniformity, fully meet the production standards of optical components and electronic accessories.

Scientific Research & Other Custom Fields

It can also be used in aerospace equipment, biopharmaceutical experiment, university laboratory research and other high-precision industrial supporting fields.

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Complete Technical Parameter List


We provide complete specifications of vacuum solenoid valves, support personalized non-standard customization services to meet differentiated equipment matching demands of global customers.

GZK512 Series Technical Parameters

Specification ItemGZK512-4.5GZK512-6
Inner Caliber4.5mm6mm
Overall Body Width40mm
Flow Coefficient Cv0.61.05
Absolute Working Pressure Range1.0×10⁻⁶~0.8×10⁶Pa1.0×10⁻⁶~0.3×10⁶Pa
Helium Leakage Rate≤1.0×10⁻⁹ Pa·m³/s
Allowable Test Pressure5.0MPa
Applicable Medium Temperature5℃ ~ 55℃
Rated Working VoltageDC24V
Rated Service Life2,000,000 Times

GZK712 Series Technical Parameters

Specification ItemGZK712-12F-12BGZK712-12F-12HGZK712-15F-15BGZK712-15F-15H
Inner Caliber12mm15mm
Overall Body Width70mm
Max Flow Coefficient3.64.7
Helium Leakage Rate≤1.0×10⁻⁹ Pa·m³/s
Applicable Medium Temperature5℃ ~ 55℃
Optional Working VoltageAC100V / AC200V / DC24V
Rated Service Life2,000,000 Times

Product Selection Reference Guide

Recommended Use of GZK512 Series

  • Semiconductor equipment process gas precise control

  • Lithium battery production line electrolyte injection control

  • Small flow high purity gas pipeline switch control

  • Laboratory precision experimental vacuum pipeline

Recommended Use of GZK712 Series

  • Photovoltaic cell coating large flow gas control

  • Large-scale vacuum drying system for new energy batteries

  • Full set of industrial large vacuum coating equipment

  • Vacuum chamber isolation protection for semiconductor large equipment

Confused about model selection? Consult our professional international sales team for free matching suggestions.

Advantages As A Reliable Chinese Supplier


Wuxi HuaTong Pneumatic is a well-known National High-Tech Enterprise & Professional High-End Intelligent Equipment Manufacturer rooted in China, with more than 70 years of professional pneumatic component R&D and manufacturing experience. We have passed ISO9001 quality management system certification and IATF16949 international industrial certification, owning independent large-scale intelligent production base and complete core technology research and development team. We have long been committed to providing high-quality import substitution industrial components for global buyers, breaking the price monopoly of foreign brands, and providing global clients with high cost-performance industrial fluid control solutions.

Fully Interchangeable

100% consistent with imported brand installation dimension and performance, direct replacement without modifying original equipment

Fast Global Delivery

Standard products support 7-15 days fast delivery, far shorter than long lead time of European, American and Japanese brands

Excellent Cost Performance

Under the same quality standard, the comprehensive procurement cost is greatly reduced, effectively helping customers control procurement budget

Local Overseas Service

Dedicated international sales team online all day long, quickly respond to overseas after-sales and technical problems

Professional Customization

Support OEM, ODM non-standard customized development, tailor-made products according to special working conditions

Obtain Customized Industrial Solution Quickly

You can send your equipment parameters, working condition requirements or design drawings. Our senior engineering team will sort out the most suitable product matching plan for you within 2 hours.

International Sales Contact: Kerry Gu

Mobile & WhatsApp: +86 131 2285 6887

Official Office Line: +86 (510) 8359-3211

Official Business Email: [email protected] / [email protected]

Working Time: Monday to Saturday 8:30 - 17:30 (GMT+8)

Factory Address: Wuxi HuaTong Pneumatic Manufacture Co., Ltd.
No. 555, Xinhui Road, Huishan Economic Development Zone, Wuxi City, Jiangsu Province, P.R.China, 214177

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